Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Aerospace, University Research, Semiconductor, Medical and OEM Applications

High Temp Puck Heater - 200mm

High Temp Puck Heater 20mm

BACKGROUND

Industrial & semiconductor applications require high heat in a centralized location. BCE designed a heater platen with the goal of 900°C operation, fast ramp & soak of at least 800°C. When tested in our BCE Lab in Hayward California, we were able to push this heater further and achieved upwards of 1,050°C.

Ramp Time:

  • Test#1 23°C to 800°C, 29 Min. (without Insulation)
  • Test#2 23°C to 800°C, 13 Min. (with 2" Insulation)
  • Test#3 23°C to 900°C, 17 Min. (with 2" Insulation)
  • Test#4 23°C to 950°C, 18 Min. (with 2" Insulation)
  • Test#5 23°C to 1,000°C, 19 Min. (with 2" Insulation)

Temperature Uniformity:

After the heater stabilized from 800°C to 950°C, the surface thermocouple on the edge to the internal thermocouple (approximately 180° away), there was a 1% to 2% delta.

Scope:

  • Material: 304 Stainless Steel with Inconel Heat Source
  • Stainless Steel CF or KF flanges of various sizes, with heat sink near heater outlet
  • 200mm ∅ x 0.50" Thick
  • Vacuum, HE Leak Test available
  • 700VDC, Hi-pot, 1mA current leakage
  • 5mΩ @ 500VDC prior to shipping

OUTCOME

Ramped heater from 23°C to 1,000°C in 19 min. under 2" thick ceramic fiber insulation. The heater was held at this temperature for 1 hour, and it intermittently hit 1,050°C.

The video below (coming soon) shows a test in atmosphere with no insulation which is less efficient but more interesting to look at.

BCE does not recommend operation above 900°C as this can drastically impact the life of the assembly. Furthermore, high-temperature operations should be in a vacuum/oxygen-free environment, and use of insulation is advised.

VIDEO

DRAWINGS

QUALITY

BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
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