Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Aerospace, University Research, Semiconductor, Medical and OEM Applications

Vacuum Heater Platens

Vacuum Heater Platen

Can be used in vacuum and atmosphere for electronic processing of next-generation displays such as computer monitors and smartphones. Adding layers of organic materials between electrodes (the cathode and anode) may be deposited on a substrate using the Vacuum Heater Platen.


  • Plate body material: Aluminum
  • Dimensions: from 6”² to 40”²
  • Internal heat source material: 304 Stainless Steel
  • Internal heat source to withstand temperature <650°C and be electrically isolated
  • Surface flatness: 0.0005” to 0.002”
  • Parallelism: 0.005”
  • Surface finish: application specific
  • A cold section on the heat source was required with Teflon™ Leads
  • Dual flanges, (1) for the heat source, (1) for the sensors
  • Type “K” Thermocouple at locations to determine uniformity
  • Voltage from: 24 Volt to 480 Volt
  • Wattage from: 500 Watt to 11,000 Watt (+/-10%)



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