200mm 8" Copper Molybdenum (CuMo) Heater Chuck
Better Uniformity Specifications Than Aluminum With a Higher Temperature Threshold
Having better uniformity specifications than aluminum with a higher temperature threshold, the Copper Molybdenum (CuMo) Heater Chuck displayed stellar performance during ramp-up and heater stabilization.
Thermal conductivity (TC) typically 210 to 255 W/m.K (with rolling process) compared to Aluminum at 205 W/m.K. Using a compressed style configuration, we utilized a 304 stainless steel bottom housing since the uniformity requirement was top end specific. This increased heat transfer towards the top CuMo side while reducing customer cost.
Electrical and Performance Specifications
200mm 8” Stainless Heater Specifications:
- High temperature up to 850°C
- Temperature uniformity 550 deg. C (+/-3 deg. C)
- 108 mtorr, pass best config. baseline (~0.4 torr/min)
- 120 Volt or 208 Volt Up to 750 Watt (+/-10%)
- External thermocouple optional
- Surface Finish: As per customer specification
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.
BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
