Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Aerospace, University Research, Semiconductor, Medical and OEM Applications

150mm 6” Semiconductor Stainless Vacuum Heater Chuck

150mm 6” Stainless Vacuum Heater Chuck

Vacuum Integrity Crucial to Heater Application Success

BCE developed this heater chuck as a higher temperature platen, beyond the limits of aluminum. The heater also reduces the cost of replacement while keeping the heat transfer and uniformity the same or better in a vacuum. The design provides vacuum integrity at higher temperatures. The heater also includes retrofitting capability for the existing vacuum heater chuck.


  • Medium vacuum compatible
  • Leak-up rate test for the best tool config (~0.4 torr/min).
  • Good temperature uniformity over 6” dia, up-to 450°C.
  • Within ± 2.5°C over most of the wafer, except the edges of a 6” dia.
  • Repeatable and Predictable temperature ramps up-to 450°C 

150mm 6” Stainless Vacuum Heater Chuck


BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
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