150mm 6” Semiconductor Stainless Vacuum Heater Chuck
Vacuum Integrity Crucial to Heater Application Success
BCE developed this heater chuck as a higher temperature platen, beyond the limits of aluminum. The heater also reduces the cost of replacement while keeping the heat transfer and uniformity the same or better in a vacuum. The design provides vacuum integrity at higher temperatures. The heater also includes retrofitting capability for the existing vacuum heater chuck.
- Medium vacuum compatible
- Leak-up rate test for the best tool config (~0.4 torr/min).
- Good temperature uniformity over 6” dia, up-to 450°C.
- Within ± 2.5°C over most of the wafer, except the edges of a 6” dia.
- Repeatable and Predictable temperature ramps up-to 450°C
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.
BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.