Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Semiconductor, OEM Applications and University Research

300mm Aluminum Heater Chuck

300mm Aluminum Heater Chuck

Innovative Approach Lowers Heater Cost

BCE developed this 300mm aluminum heater chuck that is un-brazed utilizing the compression of two plates with counter sink set screws. The heater surface specs are 0.003” flatness at a 0.005” parallelism. Using a 208 volt power supply at 9.7ohm, the heater is capable of starting @ 25°C and ramping up from 100°C to 465°C in 23 minutes.

A highly effective high 300mm heater with exceptional uniformity. The heater maintains 435°C (± 1%).


Features

  • Achieve temperature up to 435°C @ ± 2% or better
  • Internal element must be able to withstand temperatures up to 600°C
  • Anodized surface for electrical isolation
  • 208 Volt, 9.7 Ohm, 4,460 Watt (+5% / - 10%)
  • Thermocouple bore hole to be placed at the center (variable)
  • 4 point temperature profile on the top surface of the heater
  • Used an infrared sensor for each 4 point locations
  • FINISH: Hard coat anodize per MIL-A-8625F, Type 3 Class1 Hard-coat thickness  

300mm Aluminum Heater Chuck

300mm Compressed Heater Chuck Results

DRAWINGS

QUALITY

BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

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