Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

300mm Compressed Heater Chuck

300mm Compressed Heater Chuck

BACKGROUND

In an effort to reduce the overall cost for an existing application, BCE developed a 300mm Aluminum Heater chuck that is Un-brazed utilizing the compression of two plates with counter sink set screws. The heater surface specs were 0.003” flatness at a 0.005” parallelism. Using a 208 volt power supply at 9.7ohm, start @ 25°C temperature and ramped from 100°C to 465°C in 23 minutes.


SCOPE

Aluminum Heater Chuck needed to satisfy the following:
  • Achieve temperature up to 435°C @ +/- 2% or better
  • Internal element must be able to withstand temperatures up to 600°C
  • Anodized surface for electrical isolation
  • 208 Volt, 9.7 Ohm, 4,460 Watt (+5% / - 10%)
  • Thermocouple bore hole to be placed at the center (variable)
  • 4 point temperature profile on the top surface of the heater
  • Used an infrared sensor for each 4 point locations
  • FINISH: Hard coat anodize per MIL-A-8625F, Type 3 Class1 Hard-coat thickness  

OUTCOME

BCE produced a highly effective high 300mm heater with exceptional uniformity better than the proposed 435°C (+/-2%). After the initial ramp, the heater maintained 435°C (+/- 1%).

300mm Compressed Heater Chuck Results

Drawing


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