High Temp Heater Chuck – 200mm
BACKGROUND
A semiconductor equipment company in the Atomic Layer Deposition (ALD) market approached BCE in need of a custom high temperature heater solution. Their application involved a thin-film deposition using a sequence of various chemical processes. Repeating these processes results in a thin film being slowly deposited.
REQUIREMENTS
- Temperature <700°C
- Internal element must be able to withstand higher than 700°C
- Thermal break between flange and base reducing heat transfer to flange area
- 300 Series stainless steel base, sleeve, and flange must pass all required vacuum specifications
- 240 Volt 1450 Watt
- Built-in thermocouple type “K” inside internal element grounded with RF screening
OUTCOME
BCE produced a highly effective high temperature heater with exceptional uniformity. The design was able to compress the internal element enough to allow for optimal temperature transfer. The weld around the outside periphery of the base plate and the (3) lift-pin-hole-standoffs were essential in the design for vacuum integrity, ramp rate, and temperature stability.
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.
BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
