Electric heaters that provide a very high level of temperature uniformity across the semiconductor wafer to ensure consistent quality plus highly repeatable and efficient wafer processing.
Provides excellent temperature uniformity at lower cost.
A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.
Provides uniform heat in vacuum chambers.
Simultaneously Heat and Monitor Wafer Temperatures
Breaking barriers in high vacuum applications.
Fast Responding, low profile, low outgassing.