Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Hot Chuck 300mm Heater

Hot Chuck Heater 300mm

Hot Chuck Heater 300mm

Used for semiconductor wafer heating. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.

Design includes a proprietary internal element patterns, notches, and thermocouple holes, as well as adding additional manufacturing steps to provide the 2-3 Ra µin finish.


Specifications

  • Temperature uniformity +/- 1%
  • 50°C - 450°C Temperature range
  • "Mirror" surface finish of 2-3 Ra µin
  • Hard coat Anodize

Specifications (continued)

  • 6061 T6 Aluminum
  • 20 Meg-ohm isolation at 1000 VDC
  • Hi-pot 2E + 1K at 3 mA

Drawing


BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
ISO 9001

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