Hot Chuck 300mm Heater
Hot Chuck Heater 300mm
Used for semiconductor wafer heating. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.
Design includes a proprietary internal element patterns, notches, and thermocouple holes, as well as adding additional manufacturing steps to provide the 2-3 Ra µin finish.
Specifications
- Temperature uniformity ± 1%
- 50°C - 450°C Temperature range
- "Mirror" surface finish of 2-3 Ra µin
- Hard coat Anodize
- 6061 T6 Aluminum
- 20 Meg-ohm isolation at 1000 VDC
- Hi-pot 2E + 1K at 3 mA
- Flatness: 0.0001" prior to ramp
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.
BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
