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BCE Vacuum Thermowell & Heater Assembly

Vacuum Thermowell Assembly

Simultaneously Heat Wafers and Monitor Their Respective Temperatures

BTU requirement and temperature control are critical in the fabrication of silicon wafers in the semiconductor industry. Seldom can a product provide both a thermally effective means to heat wafers and simultaneously monitor their respective temperature. BCE’s Vacuum Thermowell and Heater Assembly achieves both of these criteria. Its aluminum thermowell houses a cartridge heater capable of supplying uniform heat, which can be monitored through an embedded thermocouple.


Specifications:

  • Provide BCE with a CAD of your chamber and BCE will provide you with a complete CAD assembly of the design and layout.
  • Vacuum compatible to 10-8 torr.
  • Max. operating temp. 300°C.
  • BCE epoxy meets NASA's low outgassing Spec ASTM E595.
  • RTD specs (other options available): 100 Ohm at 0°c, .00385 coef. class b 0.12%, dual wire probe is brazed to shim; 2x26 AWG Kapton insulated wire, bare end, crimped.
  • Heater specs (other options available): 500w, 240v; wire type: ni-cr 80/20; lead type: rigid NI, fiberglass insulation, Teflon sleeve; 321 SS sheath. built-in thermocouple type j, Teflon insulation.
  • All materials, dimensions and components are customizable.

Furthermore, a flange at the end of the thermowell allows for easy installation into any vacuum port and provides an effective seal via its dovetail O-ring groove. An aluminum construction further ensures that the entire assembly remains lightweight and inexpensive to machine, reducing overall product cost. Moreover, multiple RTDs are hermetically sealed into the thermowell to allow for precise temperature monitoring of wafers and other components while maintaining vacuum integrity. They can be positioned and designed for any application, as can the thermowell. In order to prevent any outgassing and minimize release of contaminants into the chamber, the RTDs are sealed using BCE’s proprietary epoxy meeting NASA’s low outgassing spec and are available with Kapton leads. Trust BCE to provide the most cost-effective and optimal solution for your vacuum application!

Drawing


BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2008.
ISO 9001

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